聚焦离子束双束系统
来源: 更新时间: 2014-11-19 点击: 330

  HGI将建成开放的学术平台,拥有的三维原子探针、扫描分析/聚焦离子束加工“双束”系统、球差较正透射电子显微镜等大型实验设备全面向社会开放。

Does working with your sample cover more than just imaging of the surface? Would you also like to know about the chemical composition or the morphology of your sample? Are you curious about in-depth 3D volume characteristics? Or do you even plan to modify or process your sample?
  AURIGA, the CrossBeam System combines the 3D imaging and analysis performance of the GEMINI e-Beam column with the ability of a FIB for material processing and sample preparation on a nanoscopic scale. The superior eucentric stage, together with a sophisticated compact multi-channel gas injection system makes the CrossBeam® workstations the ultimate analysis and inspection tool.

Function

Unique Imaging

·Imaging of non-conductive specimens using all standard detectors with local charge compensation

·Simultaneous detection of topographical and compositional information with a unique detector scheme including EsB-technology

·Investigation of magnetic samples with GEMINI objective lens design

Advanced Analytics

·Analysis of non-conducting materials with local charge compensation

·Multi-purpose chamber with whether 15 or 23 accessory ports

·Optimum chamber geometry for the simultaneous integration of EDS, EBSD, STEM, WDS, SIMS etc.

Precise Processing

·Innovative FIB technology with best-in-class resolution (< 2.5 nm)

·High resolution live FE-SEM monitoring of the entire preparation process

·Advanced gas processing technology for ion and e-beam assisted etching and deposition

Future Assured

·Available AURIGAwith modified chamber design

·Expandable platform concept based on GEMINI FE-SEM technology

Modular building blocks for value-adding functionality